To buy 6-inch LNOI wafers in 2026, start with direct wafer suppliers such as NanoLN, NGK Insulators, Soitec, Semicorex, Novel Si, and Partow Technologies, then use distributors such as MSE Supplies, SOKA, UniversityWafer, or PMOptics for small-quantity lab purchasing where available. 6-inch LNOI is now the industrial scaling format for foundry-compatible photonics, while 4-inch remains the lower-friction choice for academic R&D and early process work.

6-inch LNOI supplier and pricing table

MgO doping typically adds $800-$1,500 per wafer to the base price [UNVERIFIED]. Pricing is volatile and depends on film thickness, BOX, cut, handle wafer, doping, trimming, certificates, and order quantity.

Standard 6-inch LNOI specifications

What changes when moving from 4-inch to 6-inch

The commercial case for 6-inch is area and tool compatibility: a 150 mm wafer offers 2.25 times the surface area of a 100 mm wafer and aligns better with automated foundry equipment for 800G and 1.6T photonics programs. The engineering case is more complicated. Larger LNOI wafers amplify thickness uniformity, bonding, bow, warp, and lithography focus problems.

On 4-inch wafers, +/-10 nm uniformity may be practical for many programs. On 6-inch wafers, the research note warns that uncorrected variation can rise to 30-50 nm, so buyers should ask whether Gas Cluster Ion Beam trimming is included and whether the supplier guarantees post-trim TTV. The larger bonded area also raises the probability of trapped particles, voids, and gases, so cleanliness and bond inspection data become more important.

Bow and warp are the other practical concern. Lithium niobate and silicon have different coefficients of thermal expansion, so annealing and downstream processing can create stress. At 6 inches, that stress can show up as wafer breakage, focus error, or handling yield loss unless the fab has qualified chucks, recipes, and metrology for 150 mm LNOI.

6-inch vs 4-inch decision checklist

• Choose 6-inch if your foundry flow, stepper, bonding, or DUV process expects 150 mm wafers.
• Choose 6-inch if the program is moving beyond proof-of-concept and needs die count, repeatability, or automated lithography.
• Choose 6-inch only after confirming TTV, bow, warp, particle count, void inspection, and GCIB trimming requirements.
• Stay with 4-inch if wafer cost is the main constraint and the work is still early R&D.
• Stay with 4-inch if your local tools, carriers, wet benches, lithography, or metrology are not qualified for 150 mm LNOI.
• Ask for 6-inch LNOI on quartz if ultra-high bandwidth above 110 GHz is central to the design; verify RF loss data before ordering.
• Model real yield, not only wafer area. The research note cites early 6-inch net functional yields of 60-70% versus mature 4-inch lines above 90% [UNVERIFIED].

Where labs buy small quantities

Small-quantity lab buyers usually care less about theoretical per-die economics and more about a clean purchase path, documented spec, and short lead time. MSE Supplies, SOKA, UniversityWafer, and PMOptics are the practical starting points from the research note, with the caveat that listed prices may describe a specific cut, BOX, film thickness, handle, or promotional stock item.

Before issuing a purchase order, ask the seller to confirm wafer diameter, flat or notch, cut, film thickness tolerance, BOX thickness, handle material, handle resistivity, MgO doping, TTV, bow, warp, roughness, particle count, wafer map availability, return policy for breakage, and whether the wafer is suitable for the intended process temperature.

Related procurement paths

For a broader wafer, modulator, and foundry shortlist, see the global TFLN/LNOI supplier guide. For earlier-stage supplier mapping across advanced materials and photonics, see deep-tech sourcing. For the way Asaptic structures supplier qualification, sampling, negotiation, and handoff, see the process.

Source URLs

• NanoLN
• NGK Insulators
• Soitec
• Semicorex
• Novel Si
• Partow Technologies
• MSE Supplies
• SOKA
• UniversityWafer
• PMOptics

2026 年采购 6 英寸 LNOI 晶圆，可从 NanoLN、NGK Insulators、Soitec、Semicorex、Novel Si、Partow Technologies 等直接晶圆供应商开始；小批量实验室采购可在可用时核查 MSE Supplies、SOKA、UniversityWafer 或 PMOptics。6 英寸 LNOI 已成为面向代工兼容光子学的产业扩展格式，而 4 英寸仍是学术 R&D 和早期工艺工作的低摩擦选择。

6 英寸 LNOI 供应商和价格表

MgO doping 通常在基础价格上每片增加 $800-$1,500 [UNVERIFIED]。价格波动较大，取决于 film thickness、BOX、cut、handle wafer、doping、trimming、证书和订单数量。

常见 6 英寸 LNOI 规格

从 4 英寸转到 6 英寸会改变什么

6 英寸的商业理由在于面积和工具兼容性：150 mm 晶圆面积是 100 mm 晶圆的 2.25 倍，并更适合 800G 和 1.6T 光子项目的自动化代工设备。工程理由更复杂。更大的 LNOI 晶圆会放大厚度均匀性、键合、bow、warp 和光刻焦点问题。

4 英寸晶圆上，+/-10 nm 均匀性对许多项目可能可行。6 英寸晶圆上，研究记录警告未校正变化可升至 30-50 nm，因此采购方应询问是否包含 Gas Cluster Ion Beam trimming，以及供应商是否保证 post-trim TTV。更大的键合面积也提高 trapped particles、voids 和 gases 的概率，因此 cleanliness 和 bond inspection 数据更重要。

Bow 和 warp 是另一项实际顾虑。Lithium niobate 与 silicon 热膨胀系数不同，退火和后续加工可能产生应力。在 6 英寸上，除非 fab 已为 150 mm LNOI 合格化 chucks、recipes 和 metrology，否则该应力可能表现为晶圆破裂、焦点错误或 handling yield loss。

6 英寸 vs 4 英寸决策清单

• 若 foundry flow、stepper、bonding 或 DUV 工艺需要 150 mm 晶圆，选择 6 英寸。
• 若项目已超出 proof-of-concept，需要 die count、repeatability 或自动化光刻，选择 6 英寸。
• 只有在确认 TTV、bow、warp、particle count、void inspection 和 GCIB trimming 要求后，才选择 6 英寸。
• 若晶圆成本是主要约束且工作仍处早期 R&D，留在 4 英寸。
• 若本地工具、carriers、wet benches、lithography 或 metrology 未为 150 mm LNOI 合格化，留在 4 英寸。
• 若 110 GHz 以上超高带宽是设计核心，可询问 quartz 上的 6 英寸 LNOI；下单前核实 RF loss 数据。
• 建模真实 yield，而不只是晶圆面积。研究记录引用早期 6 英寸 net functional yields 为 60-70%，成熟 4 英寸线高于 90% [UNVERIFIED]。

实验室小批量在哪里买

小批量实验室买家通常不太关心理论每 die 经济性，更关心清晰采购路径、文件化规格和短交期。研究记录中的实际起点是 MSE Supplies、SOKA、UniversityWafer 和 PMOptics，但需注意标价可能对应特定 cut、BOX、film thickness、handle 或促销库存。

发出采购订单前，请卖方确认 wafer diameter、flat 或 notch、cut、film thickness tolerance、BOX thickness、handle material、handle resistivity、MgO doping、TTV、bow、warp、roughness、particle count、wafer map availability、破损退货政策，以及晶圆是否适合目标 process temperature。

相关采购路径

更广泛的晶圆、调制器和代工短名单见全球 TFLN/LNOI 供应商指南。先进材料和光子学早期供应商地图见深科技采购。Asaptic 如何组织供应商资格确认、打样、谈判和交接，见流程。

来源 URL

• NanoLN
• NGK Insulators
• Soitec
• Semicorex
• Novel Si
• Partow Technologies
• MSE Supplies
• SOKA
• UniversityWafer
• PMOptics

2026年採購6英寸LNOI晶圓，可從NanoLN、NGK Insulators、Soitec、Semicorex、Novel Si、Partow Technologies等直接供應商開始；小批量實驗室採購可核查MSE Supplies、SOKA、UniversityWafer與PMOptics。所有價格、庫存與規格均需採購前核實，[UNVERIFIED]信息保留自研究記錄。